| 摘要 |
A probe system has a wafer storing section for storing a semiconductor wafer as an object to be measured, a plurality of probe units for electrically measuring the wafer, a marking unit for marking a defective portion of the wafer, a repair unit for repairing the defective portion of the wafer, a baking unit for baking and drying the marked wafer, an inspection unit for detecting and examining the marked portion of the wafer marked by the marking unit, a looped convey path for conveying the wafer along the storing section and the respective units, and a convey mechanism for conveying the wafer along the convey path. Wafer transfer between the wafer storing section and the convey mechanism is performed by a first transfer mechanism, and wafer transfer between the respective units and the convey mechanism is performed by second transfer mechanisms. The probe system also controls the respective units and wafer conveyance. A surrounding member for surrounding the wafer when the wafer is to be conveyed is provided along the convey path, and the interior of the surrounding member is held in an atmosphere of the clean air or a nitrogen gas having a pressure higher than the atmospheric pressure.
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