发明名称 Apparatus for piece-by-piece development corresponding to large scale substrates.
摘要 <p>A piece-by-piece, passing type development apparatus corresponding to large scale substrates comprises a pipe for ejecting a developing solution and means for applying the developing solution ejected from the pipe onto a substrate as continuous fluid. &lt;IMAGE&gt;</p>
申请公布号 EP0550914(A1) 申请公布日期 1993.07.14
申请号 EP19920122144 申请日期 1992.12.30
申请人 CANON KABUSHIKI KAISHA 发明人 TAMURA, HIDEO
分类号 G02F1/1343;G03F7/30 主分类号 G02F1/1343
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