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发明名称
CATHODE FOR PRODUCING PLASMA
摘要
申请公布号
JPH05174721(A)
申请公布日期
1993.07.13
申请号
JP19910342997
申请日期
1991.12.25
申请人
RIKAGAKU KENKYUSHO
发明人
HAMAGAKI MANABU;HARA TAMIO
分类号
H01J27/16;H01J37/08
主分类号
H01J27/16
代理机构
代理人
主权项
地址
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