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经营范围
发明名称
STORAGE VESSEL
摘要
申请公布号
US5226713(A)
申请公布日期
1993.07.13
申请号
US19900633855
申请日期
1990.12.26
申请人
EBARA CORPORATION
发明人
MATSUMURA, MASAO
分类号
B65G1/133;B65G1/00;B65G1/02;B65G1/04;B65G49/07;H01L21/673;H01L21/677
主分类号
B65G1/133
代理机构
代理人
主权项
地址
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