Process for preparation of silane compounds of which chlorine atoms of C-C1 bonds have been reduced

摘要

The present invention relates to a process for preparation of silane compound represented by general formula (I) of which one or two hydrogens have been substituted, comprising a reaction of silane compound represented by general formula (II) with trichlorosilane in the presence of metal or metal compound as a catalyst. <IMAGE> (I) <IMAGE> (II) whereby, R1, R2 and R3 respectively represent chlorine or methyl group, and Z and Z' respectively represent hydrogen or chlorine, and as a result, the process of the present invention is industrially useful because trichlorosilane having relatively low price is employed.