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发明名称
PLASMA DEVICE
摘要
申请公布号
JPH05175165(A)
申请公布日期
1993.07.13
申请号
JP19910342767
申请日期
1991.12.25
申请人
KAWASAKI STEEL CORP
发明人
SENOO KOJI
分类号
H01L21/205;H01L21/302;H01L21/3065;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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