| 摘要 |
PURPOSE:To manufacture the ultra-high purity nitrogen by a method wherein carbon monoxide and hydrogen in raw material air are removed at a high level, in an air separating device. CONSTITUTION:An impurity removing device comprises a catalyst tower 20 to promote oxidation of carbon monoxide and hydrogen in raw material air and raw material air passages 12, 18, 24, and 34 through which raw material air flows to the catalyst tower 10. An adsorbing unit 14 to adsorb and remove hydrocarbon, carbon dioxide, and water which produce catalyst poison, from the raw material air is arranged at a position upstream of the catalyst tower 20. |
