| 摘要 |
PURPOSE:To block large solid particles and to prevent the defect of a vapor deposited film, by providing inclined guide plates which confront each other downward from the upper part and roof-shaped inclined shielding plates to a vapor source for flash vapor deposition provided with a part for heating a material to be deposited by evaporation to the lower part. CONSTITUTION:A bottom plate 1 and side plates 2 which are insulated of an insulator 3 on the outside are constituted of a stainless steel and are respectively heated by energizing electrodes (not shown) mounted to mounting holes 11, 21. The top ends of the inclined guide plates 4 confronting each other downward are bonded to the top ends of the side plates 2 confronting each other in the above-mentioned upper part. The bottom ends of the two guide plates 4 are parted to form a gap 5 therebetween. Two sheets of the shielding plates 6 are bonded at the top end to form a roof shape, are supported by a supporting rod 7 and are disposed to the lower part of said gap 5. The raw material to be deposited by evaporation is supplied from above the vapor source for flash vapor deposition constituted in the above- mentioned manner and is gluided on the surfaces of the plates 4 so as to be dropped from the gap 5 into the bottom part. The raw material is heated and evaporated via the bottom plate 1 and the side plates 2. The large solid particles jumping out by bumping are blocked by the shielding plates 6 and are thereby prevented from arriving at a material for vapor deposition. |
