| 摘要 |
PURPOSE:To obtain the method for measuring the characteristic of an acoustically uneven part of an opaque specimen and the good of the joint of a film- substrate interface in a non-contact and non-destruction way. CONSTITUTION:Laser light outgoing from a short-pulse laser 1 is divided with a beam splitter into pumping light 3 and probe light 4. The pumping light 3 excites a stress pulse in an opaque specimen 5. The probe light, by moving a corner cube 6 for adjusting the optical path length of the probe light, causes a time lag for the pump light. Reflected light 23 from the specimen 5 is combined with reference probing light 22 reflected from the rear face of a transparent plate 24 at a photodetector 7 to cause interference. |
