| 摘要 |
PURPOSE:To improve the coating efficiency of a photosensitive coating and to obtain uniform film thickness with high productivity by setting up the expansion of a spraying cone in the main and subscanning directions for spray scanning so that the main scanning direction is larger than the subscanning direction. CONSTITUTION:The center (s) of spraying executes the main scanning of the surface of a base board 10 at vector V in the width direction of the base board and executes subscanning at vector (l) in the peripheral direction. An elliptical cone spray having an angle theta in the main scanning direction and an angle psiin the subscanning direction is used, the spraying area is set up as an ellipse and the major axis/minor axis of the ellipse is set up to about 2/1. Consequently, uniform coating can be obtained by adjusting the spraying area (a) and a spraying interval and overlapping the spraying area to the optimum status and since the minor axis is assigned to the subscanning direction where the generation of scattered grains may be frequent because of the missing of sprayed drops from an adhering area, the abnormarity of the coating surface and coating loss due to recoating are suppressed. Since a section to be coated by spraying is long, at least the main scanning speed is increased and thereby the coating time can be shortened. |
