发明名称 METHOD AND SYSTEM FOR CONTROL OF A MATERIAL REMOVAL PROCESS USING SPECTRAL EMISSION DISCRIMINATION
摘要 <p>A system and method removes material from a structure, by: (a) generating a light beam (12, 549) from a suitable source (10, 512); (b) irradiating the surface material (18, 20) of a structure (14) with the light beam having an intensity sufficient to ablate the surface material and to cause the surface material to generate spectral emission signals (17) having intensities; (c) scanning the structure with the light beam at a scan speed; (d) monitoring the spectral emissions (17) to detect a selected one of the spectral emission signals having a selected wavelength and generating an electronic output signal (29a) representative of the intensity of a selected one of the spectral emission signals in response to detecting the selected one of the spectral emission signals; (e) determining an updated scan speed functionally related to the electronic output signal; and (f) directing the scan speed to be equal to the updated scan speed. A second embodiment determines the updated scan speed based on the intensity of sepctral emission signals (17) detected during predetermined intervals while the structure is illuminated by a pulsed light source (512), such as a flashlamp. A third embodiment determines an updated scan speed based on the intensity of spectral emission signals resulting from a laser pulse irradiating the structure when the output of the light beam is approximately at a minium.</p>
申请公布号 WO1993012906(A1) 申请公布日期 1993.07.08
申请号 US1992010936 申请日期 1992.12.17
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