| 摘要 |
PCT No. PCT/EP91/01405 Sec. 371 Date Feb. 7, 1994 Sec. 102(e) Date Feb. 7, 1994 PCT Filed Jul. 26, 1991 PCT Pub. No. WO92/02949 PCT Pub. Date Feb. 20, 1992.A spinning plate for substrates has on the surface of its spinning disk a continuous seal that is pressed from below against the edge of the substrate. The substrate can thus be retained by suction on the spinning disk. In order to center the substrate, a pressing element is moved under suction against the edge of the substrate and presses the same against centering stops of supporting blocks. |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US |
发明人 |
SCHMUTZ, WOLFGANG, DR.-ING., 7214 ZIMMERN, DE;GENTISCHER, JOSEF, DIPL.-ING. (FH), 7064 REMSHALDEN, DE;LEHNER, ROLF, DIPL.-ING., 7300 ESSLINGEN, DE;BOEHMER, GUDRUN, DIPL.-ING., 7000 STUTTGART, DE;MODJESCH, DIETER, DIPL.-ING. (FH), 7045 NUFRINGEN, DE |
