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发明名称
VACUUM PUMP HAVING A SENSOR OF EXHAUST GAS
摘要
申请公布号
KR0131514(Y1)
申请公布日期
1999.02.01
申请号
KR19950020732U
申请日期
1995.08.11
申请人
HYUNDAI ELECTRONICS IND. CO.,LTD
发明人
JUNG, NAM-KEUN;KOO, BON-KYUNG
分类号
H01L21/30;(IPC1-7):H01L21/30
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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