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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05166823(A)
申请公布日期
1993.07.02
申请号
JP19910331014
申请日期
1991.12.16
申请人
FUJITSU LTD
发明人
SHIMIZU ATSUO
分类号
H01L29/73;H01L21/331;H01L29/732
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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