| 摘要 |
PURPOSE:To easily perform centering work and align resonators by housing and arranging an output- and rear-side resonators supported by two or more supporting bars having low coefficients of thermal expansion at a fixed interval, the supporting bars, a laser exciting unit, laser gas circulating air blower, cooling heat exchanger, etc., in an enclosure. CONSTITUTION:A discharging section 1 for exiting a laser gas, air blower 2 and motor 3 for feeding and circulating the laser gas to and in the section 1, and heat exchanger for cooling the laser gas are housed in a wind channel 5. Then an output- and rear-side resonators 6a and 6b for the excited laser gas performing laser oscillation are also housed in the wind channel 5 while the resonators are supported by two or more supporting bars 8 at a fixed interval and arranged on the optical axis of the discharging section 1. Therefore, the alignment between the resonators 6a and 6b and the section 1 and between the resonators 6a and 6b can easily be performed and, at the same time, a stable laser output can be obtained while the oscillating efficiency is maintained and the size of the equipment is reduced. |
