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发明名称
摘要
申请公布号
JPH0543186(B2)
申请公布日期
1993.06.30
申请号
JP19850264787
申请日期
1985.11.27
申请人
HITACHI LTD
发明人
MIZUKOSHI KATSURO;PPONGO MIKIO
分类号
H01L21/268;H01L21/82;(IPC1-7):H01L21/82
主分类号
H01L21/268
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代理人
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