发明名称 FIELD EFFECT TRANSISTOR AND DYNAMIC SEMICONDUCTOR STORAGE DEVICE USING SAME
摘要 PURPOSE:To provide a field effect transistor which can get excellent properties in spite of micronization and has even a structure similar to an SGT. CONSTITUTION:A p<+>-type gate electrode 7 is made through a gate insulating film 6 so as to surround an n-type column-shaped silicon 1, where the center is a channel, and a source electrode 4 and a drain electrode 5 are made through n<+>-type layers 2 and 3, respectively, at both ends of the column-shaped silicon 1, and a channel current is controlled by controlling the a depletion layer, which extends toward the center from the periphery of the column-shaped silicon 1 by the bias given to the gate electrode 7.
申请公布号 JPH05160408(A) 申请公布日期 1993.06.25
申请号 JP19910320383 申请日期 1991.12.04
申请人 TOSHIBA CORP 发明人 TERAUCHI MAMORU;NITAYAMA AKIHIRO
分类号 H01L27/10;H01L21/8242;H01L27/108;H01L29/78 主分类号 H01L27/10
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