发明名称 MULTISPINDLE CONTROLLER FOR WIRE BONDER
摘要 PURPOSE:To realize highly reliable trace control of tool by calculating operational commands for X, Y, Z spindles based on a three-dimensional model as a basic data for tool tracing and then controlling a servo circuit while timing the operation between at least two spindles. CONSTITUTION:The wire bonder for forming a wire loop of desired shape while controlling a tool in X, Y, Z directions by means of motors 8, 9, 10 dedicated to respective spindles through servo circuits 2, 3, 4 is provided with an operating section 1 for calculating operational commands for respective spindles based on a three-dimensional trace model of tool and delivering thus calculated operational commands to respective servo circuits 2, 3, 4 while synchronizing the respective spindles.
申请公布号 JPH05160193(A) 申请公布日期 1993.06.25
申请号 JP19910324178 申请日期 1991.12.09
申请人 HITACHI LTD;HITACHI TOKYO ELECTRON CO LTD 发明人 CHIBA HIDEYUKI;KATAYAMA YOSHIFUMI;NADAMOTO KEISUKE
分类号 G05D3/00;H01L21/60 主分类号 G05D3/00
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