| 摘要 |
PURPOSE:To provide an improved aligner for a TAB which removes a shortage of the partial emitting amount of ultraviolet rays towards the exposing plane where the ultraviolet rays are emitted on the photosensitive resist plane coating metallic foils to print wiring patterns, and which always exposes appropriately to obtain favorable wiring patterns. CONSTITUTION:In an aliner for a TAB in which lights of an ultraviolet lamp are emitted on the plane of photosensitive resist 10 coating 2 metallic foils 9 through a photomask to print wiring patterns, a reflection plate 11 for changing a light path of a part of the emitted lights is arranged in the middle of the light path of the ultraviolet rays. |
