Simple compact gas detector for selective detection - comprise support, gallium oxide semiconducting layer, contact electrode, temp. gauge, heating and cooling elements

摘要

The detector comprises a sensor support, a sensor layer of semiconducting Ga2O3 whose electrical conductivity is influenced by chemisorption of gases, a contact electrode arrangement, a temp. gauge, heating and cooling elements to alter the temp. of the sensor layer. The sensor layer is electrically insulated on one surface of the sensor support, and the contact electrode arrangement measures the electrical conductivity of the sensor layer. The sensor support (31) pref. comprises a electrically non-conducting ceramic pref. Al2O3, BeO or MgO esp. Al2O3 with a diffusion barrier layer of BeO, SiO2 or TiN. ADVANTAGE - The appts. is simple, compact and inexpensive.