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发明名称
半导体装置及其制造方法与电镀液
摘要
本发明的一目的为改善含有金属区域之半导体装置中的抗应力迁移性及可信赖性。于绝缘膜101中,将由阻障金属膜102及铜–银合金膜103组成的下互连形成,而后于其上形成一层间绝缘膜104。于层间绝缘膜104中,将由阻障金属膜106及铜–银合金膜111组成的上互连形成。下及上互连系由铜–银合金制成,其含有银含量多于银对铜的固体溶液限制。
申请公布号
TW200408020
申请公布日期
2004.05.16
申请号
TW092109427
申请日期
2003.04.22
申请人
NEC电子股份有限公司
发明人
上野 和良
分类号
H01L21/60;H01L21/326
主分类号
H01L21/60
代理机构
代理人
周良谋;周良吉
主权项
地址
日本
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