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发明名称
VACUUM VAPOR DEPOSITION DEVICE
摘要
申请公布号
JPH05156438(A)
申请公布日期
1993.06.22
申请号
JP19910323575
申请日期
1991.12.09
申请人
NIKON CORP
发明人
MATSUMOTO HIROYUKI
分类号
C23C14/24;C23C14/54
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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