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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05152315(A)
申请公布日期
1993.06.18
申请号
JP19910291112
申请日期
1991.11.07
申请人
FUJITSU LTD
发明人
SUGII TOSHIHIRO;ARIMOTO YOSHIHIRO
分类号
H01L29/73;H01L21/331
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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