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发明名称
MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH05152525(A)
申请公布日期
1993.06.18
申请号
JP19910314305
申请日期
1991.11.28
申请人
HITACHI LTD
发明人
OKAWA MASAAKI
分类号
H01L21/28;H01L21/768;H01L21/8234;H01L27/088;H01L29/78
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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