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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH05152296(A)
申请公布日期
1993.06.18
申请号
JP19910202582
申请日期
1991.07.15
申请人
MITSUBISHI ELECTRIC CORP
发明人
MUKAI TAKAO
分类号
H01L21/302;H01L21/3065;H01L21/3205
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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