PRODUCTION OF DIFFRACTION GRATING OF SIC SUBSTRATE,申请号JP19910340134-传众专利搜索

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发明名称	PRODUCTION OF DIFFRACTION GRATING OF SIC SUBSTRATE
摘要
申请公布号	JPH05150110(A)	申请公布日期	1993.06.18
申请号	JP19910340134	申请日期	1991.11.28
申请人	SHIMADZU CORP	发明人	KOEDA MASARU;NAGANO TETSUYA
分类号	G02B5/18	主分类号	G02B5/18
代理机构		代理人
主权项
地址

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