METHOD OF HIGH SELECTIVITY SAC ETCHING,申请号KR20027015103-传众专利搜索

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发明名称	METHOD OF HIGH SELECTIVITY SAC ETCHING
摘要
申请公布号	KR100759602(B1)	申请公布日期	2007.09.17
申请号	KR20027015103	申请日期	2002.11.11
申请人		发明人
分类号	H01L21/28	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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