| 摘要 |
<p>PURPOSE:To provide a discharge plasma generator which can change discharge performance corresponding to a purpose by using an induction electric field where a comparatively high voltage is easily available without using a microwave, and by changing the forms of discharge electrodes or intervals thereof or the frequency of an applied voltage. CONSTITUTION:Two or more ring-like magnetic substances 7, 8 are arranged at the peripheral portions of pipings 2, 3, and coils 9, 10 are wound around the ring-like magnetic substances 7, 8, and also electrodes 13, 14 to promote discharge are arranged inside the pipings 2, 3. Atmospheric pressure or exhaust gas or specific gas whose pressure is lower than the atmospheric pressure is made to exist inside the pipings so that discharge plasma is generated inside the pipings 2, 3 by applying AC voltage to the coils 7, 10.</p> |
