PHOTO-ASSISTED CVD APPARATUS,申请号JP19910333967-传众专利搜索

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发明名称	PHOTO-ASSISTED CVD APPARATUS
摘要
申请公布号	JPH05144750(A)	申请公布日期	1993.06.11
申请号	JP19910333967	申请日期	1991.11.21
申请人	SONY CORP	发明人	WATANABE TETSUO
分类号	C23C16/48;B25J9/10;C30B25/08;H01L21/205;H01L21/263	主分类号	C23C16/48
代理机构		代理人
主权项
地址

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