摘要 |
PURPOSE:To simplify polarization process and to stabilize the extent of polarization of a piezoelectric vibrator for ultrasonic motor. CONSTITUTION:A piezoelectric vibrator element 13 has one surface patterned with a plurality of first and second discrete driving electrodes 43, 45 and an opposing surface similarly patterned with a plurality of discrete electrodes 27 opposing to the first and second discrete driving electrodes 43, 45. The first and second discrete driving electrodes 43, 45 are alternately applied with plus and minus high voltages whereas the discrete electrode 27 is alternately applied with minus and plus high voltages in reverse order to the first and second discrete driving electrodes 43, 45 thus polarizing the piezoelectric vibration element 13 at once. First discrete driving electrodes 43 and second discrete driving electrodes 45 are then connected, respectively, in common in first and second connecting patterns formed on a flexible substrate 47 thus manufacturing a piezoelectric vibrator 11. |