An improved design of halogen generator in which gas entering the generator is pre-heated to prevent cooling of the halogen source in the generator and gas flow through the generator exhibits improved uniformity, to give a more consistent performance from the generator.
申请公布号
WO9311065(A1)
申请公布日期
1993.06.10
申请号
WO1992GB02152
申请日期
1992.11.20
申请人
OXFORD LASERS LIMITED
发明人
KEARSLEY, ANDREW, JOHN;SALKELD, THOMAS, NEVILLE, WALTON;FERGUSON, ALAN, HOWARD;MCGRADY, GERARD, SEAN
