DEPOSITION APPARATUS AND METHODS

摘要

2124215 9311276 PCTABS00022 A reactor (10) defines a chamber (11) in which are disposed an upper electrode (12) and a lower workpiece electrode (13). The upper electrode is connected to a R.F. supply whilst the lower electrode is connected to a stress control unit (14). The stress control unit is used to adjust or maintain the effective resistance of the connection between the workpiece electrode (13) and ground.