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发明名称
VERFAHREN ZUM HERSTELLEN VON METALLISIERTEN KONTAKTLOECHERN UNTERSCHIEDLICHER HOEHE.
摘要
申请公布号
DE3880709(D1)
申请公布日期
1993.06.09
申请号
DE19883880709
申请日期
1988.01.21
申请人
FRANCE TELECOM, PARIS, FR
发明人
LAMI, PHILIPPE, MEYLAN, FR;ROMAGNA, FRANCOISE, BRIGNOUD, FR
分类号
H01L21/768;(IPC1-7):H01L21/90
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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