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经营范围
发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH05140738(A)
申请公布日期
1993.06.08
申请号
JP19910302890
申请日期
1991.11.19
申请人
CANON INC
发明人
ANDO KENJI;KAMEYAMA MAKOTO
分类号
C23C14/34;C23C14/50
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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