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发明名称
HALBLEITERVORRICHTUNG
摘要
申请公布号
DE4235175(A1)
申请公布日期
1993.06.03
申请号
DE19924235175
申请日期
1992.10.19
申请人
FUJI ELECTRIC CO., LTD., KAWASAKI, KANAGAWA, JP
发明人
KIRIHATA, FUMIAKI, KAWASAKI, KANAGAWA, JP
分类号
H01L21/8222;H01L27/06;H01L29/10;H01L29/739;H01L29/78;H01L29/861
主分类号
H01L21/8222
代理机构
代理人
主权项
地址
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