发明名称 |
Substrate transport apparatus. |
摘要 |
<p>A deck movable between cassettes arranged on a base for storing a plurality of substrates in multiple stages and a substrate cleaning section for cleaning the substrates, supports a substrate fetching arm for fetching the substrates from the cassettes, and a cleaned substrate depositing arm for depositing treated substrates. The depositing arm is vertically movable between a position in which a substrate supporting surface thereof is situated below a substrate supporting surface of the substrate fetching arm to render the latter operative, and a position in which the supporting surface of the depositing arm is situated above the supporting surface of the fetching arm to render the depositing arm operative. <IMAGE></p> |
申请公布号 |
EP0544311(A1) |
申请公布日期 |
1993.06.02 |
申请号 |
EP19920120238 |
申请日期 |
1992.11.26 |
申请人 |
DAINIPPON SCREEN MFG. CO., LTD. |
发明人 |
FUKUTOMI, YOSHITERU;OHTANI, MASAMI;OKAMOTO, TAKEO |
分类号 |
H01L21/683;G02F1/13;H01L21/304;H01L21/677 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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