A microwave is made of a stack of layers. A sculptured silicon substrate is held between two covers each consisting of one or more layers. The inlet and the outlet of the microvalve are formed by perforations in the respective covers. A central valve plate is sculptured out of the silicon substrate with surfaces respectively facing the two covers in the region of the inlet and outlet in a symmetrical fashion. The valve plate is connected to the outer frame portion of the silicon substrate by one or more silicon strips. The valve plate is also shaped as a closure member near the inlet and/or the outlet. Electrodes are provided on the covers opposite the valve plate so that the valve can be electrostatically actuated with the valve plate serving as counterelectrode for these electrodes on the covers.
申请公布号
US5216273(A)
申请公布日期
1993.06.01
申请号
US19910762940
申请日期
1991.09.19
申请人
ROBERT BOSCH GMBH
发明人
DOERING, CHRISTIAN;GRAUER, THOMAS;METTNER, MICHAEL;SCHUELKE, ARMIN;MAREK, JIRI;TRAH, HANS-PETER;MUCHOW, JOERG;WILLMANN, MARTIN