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经营范围
发明名称
SEMICONDUCTOR MANUFACTURING DEVICE
摘要
申请公布号
JPH05136245(A)
申请公布日期
1993.06.01
申请号
JP19910293119
申请日期
1991.11.08
申请人
TOKYO ELECTRON LTD;TOSHIBA CORP
发明人
KUMAGAI HIROMI;SUMITOMO KOSUKE;TOKUMARU HIDEYUKI
分类号
H01L21/677;H01L21/68
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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