METHOD AND DEVICE FOR CLEANING SEMICONDUCTOR WAFER

摘要

Device for converting the rotary motion of an eccentric driven by a motor shaft into an oscillating motion of a working tool in electrically powered appliances, consisting of a double-armed rocker arm and a connecting rod connecting the rocker arm with the eccentric, as well as a single articulation at whose articulation midpoint all the motion axes of the connecting rod and rocker arm meet directly or indirectly.