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发明名称	PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH05129253(A)	申请公布日期	1993.05.25
申请号	JP19910286200	申请日期	1991.10.31
申请人	FUJITSU LTD	发明人	OBARA OSAMU
分类号	H01L21/302;H01L21/306;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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