| 摘要 |
PROBLEM TO BE SOLVED: To prevent inflammation of combustible gas in advance even if a spark is generated in a thin film ultrasonic sensor in a combustible gas atmosphere.SOLUTION: A thin film ultrasonic sensor comprises a lower electrode on a thin plate, a piezoelectric element provided on the lower electrode, an upper electrode provided on the piezoelectric element, a first signal line connected to the lower electrode, and a second signal line connected to the upper electrode. When the thin film ultrasonic sensor like this is installed in a subject, an adhesive agent having heat-resistance is applied on the surface of the subject, the thin film ultrasonic sensor is placed on the adhesive agent (an adhesive agent application process: a step SA1), then a seal material having heat-resistance is applied so as to cover a connection part between the upper electrode and the second signal line and an exposed part of the second signal line (a seal material application process: a step SA2), and the adhesive agent and the seal material are cured (a curing process: a step SA3).SELECTED DRAWING: Figure 3 |
