POSITION DETECTION METHOD

摘要

PURPOSE:To obtain a position-detection method which detects positions of objects in the order of sub mum to position the objects when mounting semiconductor devices on a wiring board. CONSTITUTION:A recognition mark where M-series signals are arranged two- dimensionally at an part of an object. An image which is obtained by picking up and confirming the recognition mark with a TV camera and a mark which is in a same reference as a previously stored recognition mark are correlated by the matching method and the position of the target is detected based on the result.