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发明名称
LICHTEMPFINDLICHES GEMISCH AUF DER BASIS VON O-NAPHTHOCHINONDIAZIDEN UND DARAUS HERGESTELLTES LICHTEMPFINDLICHES MATERIAL
摘要
申请公布号
DE4137325(A1)
申请公布日期
1993.05.19
申请号
DE19914137325
申请日期
1991.11.13
申请人
HOECHST AG, 6230 FRANKFURT, DE
发明人
SCHELER, SIEGFRIED, DR., 6200 WIESBADEN, DE;ELSAESSER, ANDREAS, DR., 6270 IDSTEIN, DE;BUHR, GERHARD, DR., 6240 KOENIGSTEIN, DE;BERGMANN, KLAUS, 6500 MAINZ, DE;ZAHN, WOLFGANG, DR., 6228 ELTVILLE, DE
分类号
G03F7/00;G03F7/022;H01L21/027;H01L21/30
主分类号
G03F7/00
代理机构
代理人
主权项
地址
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