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发明名称
SEMICONDUCTOR PROCESSOR
摘要
申请公布号
JPH05121360(A)
申请公布日期
1993.05.18
申请号
JP19910090403
申请日期
1991.04.22
申请人
TOKYO ELECTRON YAMANASHI KK
发明人
FUKAZAWA KAZUO;OKAYAMA NOBUYUKI;SUETSUGU MASACHIKA
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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