| 摘要 |
<p>PURPOSE:To attain an X-ray mask support body and an X-ray mask structure body which are excellent in properties of transmitting an X ray and visible and near-infrared rays, in which no curvature is caused even by heating by X-ray irradiation and which are excellent in mask precision, by forming an X-ray transmitting film of single-layer films or multilayer lamination films being different in density in the direction of the thickness thereof. CONSTITUTION:Layers 2a and 2b of an X-ray transmitting film 2 constituted of a multilayer lamination film are formed of compounds of which the main component elements are identical. The density of the layer 2a adjacent to the support frame 1 side is made larger than that of the layer 2b adjacent to the layer 2a. Besides, the layer 2a is a film of high density having no columnar crystal structure in its structure, while the layer 2b is made to have the columnar crystal structure not being a layer having such a high density as the above. According to this constitution, an X-ray mask support and an X-ray mask structure which are excellent in properties of transmitting an X ray and visible and near-infrared rays and, besides, in which no curvature is caused even by the irradiation of the X ray can be furnished. Furthermore, the excellent X-ray mask structure which attains X-ray exposure of high precision and high resolution can be furnished in a simple and safe manner.</p> |
