| 摘要 |
<p>PURPOSE:To prevent charge-up in the portion of an insulator so as to stabilize emitted electrons and at the same time to enable modulation and formation of beams at a low voltage by providing a conductive thin film having electron through holes between an electron emitting portion and a grid electrode. CONSTITUTION:An insulation layer 5 is formed of a pair of electrode 2, 3 and SiO2 on an insulation glass substrate 1 and then electron emitting portions 4 are exposed by etching and coated with organic palladium compound and baked to complete a surface-conduction type electron emitting element portion. A conductive thin film 6, a second insulation layer 5 and a grid electrode 7 made of nickel are formed thereon, and grid hole is opened perpendicularly above the electron emitting portions 4. It is used as a mask for etching each layer to expose the electron emitting element. When it is placed in a vacuum container and the ground potential is applied to the electrode 2 and a positive potential is applied to the electrode 3 and the thin film 6 to emit electrons, the potential to be applied to the electrode 7 may be substantially half of the potential in the case where no voltage is applied to the thin film 6 and an equivalent emission can be obtained.</p> |
