METHOD FOR MANUFACTURING OXIDE SUPERCONDUCTING FILMS BY LASER EVAPORATION

摘要

A method of manufacturing a layer of a superconducting high-Tc-material. For this purpose, an appropriate target material is deposited on a predetermined substrate by a pulsed laser with a wavelength in the ultraviolet range and, by applying a heat treatment and an oxygen treatment, the desired superconducting metal-oxide phase is formed with an ordered crystal structure. The heat treatment and oxygen treatment are performed simultaneously during the vaporizing step, whereby a power density of the laser radiation of over 3 J/cm2 at the target material is provided, the pulse power of the laser is at least 1.5 J/pulse, the temperature of the substrate is raised to 600 DEG C. to 800 DEG C., and an oxygen atmosphere of between 0.02 mbar and 1 mbar is provided.