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发明名称
ORGANOMETALLIC COMPOUND SOLUTION FOR CHEMICAL VAPOR DEPOSITION
摘要
申请公布号
JPH05117855(A)
申请公布日期
1993.05.14
申请号
JP19910238386
申请日期
1991.09.18
申请人
NIPPON SANSO KK
发明人
KOBAYASHI KAZUMI;NAKAI TOMOAKI;HAYASHIDA SHIGERU;SUGIMORI YOSHIAKI
分类号
C23C16/18
主分类号
C23C16/18
代理机构
代理人
主权项
地址
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