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发明名称
摘要
申请公布号	JPH0517891(Y2)	申请公布日期	1993.05.13
申请号	JP19860201389U	申请日期	1986.12.27
申请人		发明人
分类号	G01J1/02;G01J1/04;G02B5/20;H01L31/02;H01L31/0232;(IPC1-7):H01L31/02;H01L31/023	主分类号	G01J1/02
代理机构		代理人
主权项
地址

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