发明名称 Probe for atomic force microscope usable for scanning tunneling microscope.
摘要 <p>According to the invention, a probe for an atomic force microscope comprising a means for tunneling current is disclosed. The probe has a metal tip which is covered with a monomolecular film. The body of the probe is covered with a monomolecular laminated film, wherein conductive molecules are fixed on the the monomolecular film and/or the said monomolecular laminated film. The monomolecular laminated film has a closslinked electroconductive surface. The monomolecular laminated film is fixed on the metal by a covalent bond comprising a siloxane base (-SiO-), and the laminated part of the molecule is also chemically fixed on the metal surface by a covalent bond comprising a siloxane base (-SiO-). The probe of this invention is durable and can be put to practical use, because the films are surface conductive rather than conductive through its thickness. Moreover, compared with a conventional probe, since this probe does not metal deposited on the surface, it has high reproducibility with less process step to manufacture the probe. <IMAGE></p>
申请公布号 EP0540839(A1) 申请公布日期 1993.05.12
申请号 EP19920114094 申请日期 1992.08.18
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 NAKAGAWA, TOHRU
分类号 G01B21/30;C09D183/04;G01B7/34;G01N27/00;G01N27/416;G01Q60/04;G01Q60/10;G01Q60/16;G01Q60/24;G01Q60/38;G01Q60/40;G01Q70/14 主分类号 G01B21/30
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